Thin film deposition tools
Alkaline niobates , ZnO, TiO2, and electrode materials
PI MOCVD
PIMOCVD
DLI-CVD, MCP100
RF sputtering
RF sputtering facilities @MIMENTO technological platform
Glove Box
Inert working atmosphere (O2 < 1ppm & H2O < 1 ppm)
Solvent purification
Material synthesis and treatments
Single crystals, powders and nanomaterials (alkaline niobates)
Powder synthesis
High temperature synthesis (up to 1400 °C)
Vapor transport equilibration
Precision control of Li nonstoichiometry in LiNbO3 and LiTaO3 single crystals (stoichiometric and sub-congruent compositions, compositional gradients)
Molten salt synthesis of nanowires
Alkaline niobate nanowires
Material Characterization Techniques
Compositional, structural and physical properties
Raman spectroscopy
High-resolution visible micro-Raman spectrometer
Monovista, S&I
X-ray diffraction
Aeris diffractometer, Panalytical
High-temperature cell (< 500 °C)
Ellipsometry
Spectroscopic ellipsometry @ MIMENTO facilities
Refraction index, Energy gap, layer thickness, etc.
E-beam lithography
Done by E-beam and film deposition facilities @ MIMENTO
SAW devices
SAW resonators @ GHz frequencies
Waveguides
LiNbO3 & TiO2 waveguides