Annealsys invests to the industrialization of alkaline niobate deposition by DLI-CVD

 Objectives

Fast and reproducible synthesis with up-scaling possibilities of high-quality textured and epitaxial alkaline niobate (LiNbO3 , LiTaO3, & KNbO3) thin films suitable for acoustical, optical and energy harvesting applications

Capability

  • 2 precursor lines (multi-metallic oxides) with storage at RT
  • Fully automatic and fully secured in case of failure (water, electricity, compressed air…)
  • 100 mm substrates
  • DLI-ALD