Main activity concerns Fluidic MEMS, Sensors and Actuators.
The targeted application areas are mainly biomedical, food processing and transportation.

Main activity : Micro acousto fluidic Interactions

his theme concerns the study of the interaction of acoustic waves and local vibrations with fluids at the dimensions of microsystems. This concerns LAMB wave microsensors and the manipulation of fluid acoustics (drops, mixtures, etc.) and particles, which is the result of previous work on piezoelectric microactuators.

Former activity :

  • Micro ultrasonic motors

This work concerns the design of progressive wave piezoelectric micromotors with a diameter of the order of mm. We have developed a class of actuators working on the quasi-progressive wave principle allowing for example to obtain a circular motion in a square plate. These actuators have shown performances close to those of classical circular motors of the same size. This work is partly at the origin of the devices for the manipulation of droplets

  • Distributed fluidic microactuator

This work concerns the study and design of distributed microactuators applied either to the active control of the boundary layer of a flow in the transport domain, or in the context of object manipulation (e.g. sorting of microobjects (ANR Smartsurface-ANR SmartBlocks project)